Exam inspectation

Appointments for exam inspection are made individually. Requests are made in advance by e-mail to Ms. Melanie Stichling.

Each student will be allowed 15 minutes to view the exam. Please come to room 3120 only at the specified time and keep the necessary distance.

Teaching

The Department of Microsystems Engineering offers courses for a comprehensive education in the field of microsystems engineering. There are lectures for both the bachelor's and master's degree programs, which are often directly related to practice.

Furthermore, student theses are assigned in the department, which serve the further scientific qualification. The topics of these theses are often directly integrated into the research projects of the department or can also be carried out in cooperation with industrial companies. Students are encouraged to participate in the design of the topics. Thus, there is also the possibility to gain practical experience in the clean room of the IMN during the processing of the student theses.

Courses

Below you will find an overview of the current courses with further information. The lecture dates can be found at https://opentimetable.tu-ilmenau.de/ or under the respective Moodle course.

Course

Contents of the courses

Module board for further information

Microtechnology / Introduction to Microsystems Technology

  • Introduction
  • Scaling and similarity
  • Basic materials
  • Optical and electron beam lithography
  • Material structuring: wet etching, dry etching
  • Thin film technologies
  • Measuring and testing methods

Microsensors and microactuators

  • Introduction: Overview, terms and scaling
  • Noise in Microsystems
  • Transducer principles
  • Micromechanical bending beams
  • Attenuation in microsystems
  • Microsensors
  • Microactuators

Microtechnologies 2

  • Thin-film technologies
  • Materials of microsystems technology
  • Process optimization with "Design of Experiments" (Eng)
  • Workflow for the production of a micromechanical system
  • MEMS simulation with finite elements (FEM)
  • Selected systems of microsystems technology

Microtechnology 2

  • Introduction: Scaling Laws, Cleanroom Technology
  • Materials for Microsystems
  • Micro- and Nanolithography
  • Etching Technologies
  • Deposition Technologies
  • Selected Topics

Micorsensors and Microactuators

  • Introduction: overview, definitions and scaling
  • Noise in Microsystems
  • Transducer principles
  • Micromechanical cantilevers
  • Damping in microsystems
  • Microsensors
  • Microactuators