Sub-project TM

A central topic of the first funding period was the investigation of measurements on highly curved surfaces by extending the NPMM by two degrees of freedom (tool/sensor swivel unit) while adhering to the Abbe comparator principle. As a result of the research work, a demonstrator for a 5-axis nanopositioning and nano-measuring machine was built and investigated on the basis of metrological and design variant comparisons. It was found that the properties of the system depend significantly on the metrological quality of the reference hemisphere and the associated interferometer systems. Extensive further research in this area is required to penetrate the lower nanometer range with the metrological parameters. Special attention has to be paid to a detailed error analysis of the interferometer system in order to achieve a significant quality improvement of the metrological chain. Another goal is the optimization of the reference hemisphere with respect to material selection and manufacturing technology in order to ensure the required topological properties for metrological applications in the nanometer range. As a result of the research work, metrological and design guidelines for multi-axis nanopositioning and nanometrology systems will be developed at the end of the second funding period from the point of view of suitability for applications in nanofabrication.

Project leader: Prof. Füßl, Prof. Fröhlich

This subproject pursues the traceable calibration of combined force-position sensor systems. The aim of the further work is to significantly improve the metrologically traceable calibration of force sensors in the nanonewton range and to develop a fundamental measuring device for small forces from the calibration setup realsized in the first generation. This fundamental measuring device is to be traceable to SI units in three different ways:
   - Gravimetrically with small mass standards
   - Electromagnetically according to the Kibble-Waagen principle
   - Electrostatic
Another goal is to transfer the calibration of nanonewton forces - which has been demonstrated on a large scale - to MEMS systems. In cooperation with subproject A1, methods for direct and indirect calibration of the selfactuated MEMS probes developed there will be found and investigated. The long-term goal is MEMS probes that measure forces and displacements and are self-calibrating in-situ. With the cantilever calibration system as well as with the calibrated cantilevers/feeler probes, we want to implement and investigate calibrations on reference marks of known geometries and material properties on the object itself for the first time, taking advantage of the high positioning accuracy of the NPMM. A conceptual and substantive collaboration is planned in particular with the subprojects KR2, A1 and TM1.

Project leader: Prof. Fröhlich, Prof. Reger, Dr. Schäffel