Tschumak, Elena; Tonisch, Katja; Pezoldt, Jörg; As, Donat J.
Comparative study of 3C-GaN grown on semi-insulating 3C-SiC/Si(100) substrates. - In: Silicon carbide and related materials 2008, (2009), S. 943-946
http://dx.doi.org/10.4028/www.scientific.net/MSF.615-617.943
Comparative study of 3C-GaN grown on semi-insulating 3C-SiC/Si(100) substrates. - In: Silicon carbide and related materials 2008, (2009), S. 943-946
http://dx.doi.org/10.4028/www.scientific.net/MSF.615-617.943
Kups, Thomas; Tonisch, Katja; Voelskow, Matthias; Skorupa, Wolfgang; Konkin, Alexander L.; Pezoldt, Jörg
Structure and lattice location of Ge implanted 4H-SiC. - In: Materials science forum, ISSN 1662-9752, Bd. 600/603 (2009), S. 623-626
http://dx.doi.org/10.4028/www.scientific.net/MSF.600-603.623
Structure and lattice location of Ge implanted 4H-SiC. - In: Materials science forum, ISSN 1662-9752, Bd. 600/603 (2009), S. 623-626
http://dx.doi.org/10.4028/www.scientific.net/MSF.600-603.623
Stauden, Thomas; Niebelschütz, Florentina; Tonisch, Katja; Cimalla, Volker; Ecke, Gernot; Haupt, Christian; Pezoldt, Jörg
Isotropic etching of SiC. - In: Materials science forum, ISSN 1662-9752, Bd. 600/603 (2009), S. 651-654
http://dx.doi.org/10.4028/www.scientific.net/MSF.600-603.651
Isotropic etching of SiC. - In: Materials science forum, ISSN 1662-9752, Bd. 600/603 (2009), S. 651-654
http://dx.doi.org/10.4028/www.scientific.net/MSF.600-603.651
Michael, Steffen; Brückner, Klemens; Niebelschütz, Florentina; Tonisch, Katja; Schäffel, Christoph
Parameter identification of piezoelectric AlGaN/GaN beam resonators by dynamic measurements. - In: 10th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, 2009, ISBN 978-1-4244-4161-7, (2009), insges. 4 S.
http://dx.doi.org/10.1109/ESIME.2009.4938498
Parameter identification of piezoelectric AlGaN/GaN beam resonators by dynamic measurements. - In: 10th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, 2009, ISBN 978-1-4244-4161-7, (2009), insges. 4 S.
http://dx.doi.org/10.1109/ESIME.2009.4938498
Brückner, Klemens; Niebelschütz, Florentina; Tonisch, Katja; Stephan, Ralf; Cimalla, Volker; Ambacher, Oliver; Hein, Matthias
Resonant piezoelectric ALGaN/GaN MEMS sensors in longitudinal mode operation. - In: IEEE 22nd International Conference on Micro Electro Mechanical Systems, 2009, ISBN 978-1-4244-2977-6, (2009), S. 927-930
http://dx.doi.org/10.1109/MEMSYS.2009.4805536
Resonant piezoelectric ALGaN/GaN MEMS sensors in longitudinal mode operation. - In: IEEE 22nd International Conference on Micro Electro Mechanical Systems, 2009, ISBN 978-1-4244-2977-6, (2009), S. 927-930
http://dx.doi.org/10.1109/MEMSYS.2009.4805536
Cimalla, Irina Nicoleta; Gebinoga, Michael; Klett, Maren-Jördis; Lübbers, Benedikt; Lebedev, Vadim; Tonisch, Katja; Cimalla, Volker; Ambacher, Oliver; Schober, Andreas
Bioreactor with integrated nanosensor for the recording of extracellular potential of nerve cells: response to inhibitors record with AlGaN/GaN field - effect transistor. - In: Life sciences, medicine, and bio materials, ISBN 978-1-420-08504-4, (2008), S. 566-568
Bioreactor with integrated nanosensor for the recording of extracellular potential of nerve cells: response to inhibitors record with AlGaN/GaN field - effect transistor. - In: Life sciences, medicine, and bio materials, ISBN 978-1-420-08504-4, (2008), S. 566-568
Brückner, Klemens; Niebelschütz, Florentina; Tonisch, Katja; Michael, Steffen; Dadgar, Armin; Krost, Alois; Cimalla, Volker; Ambacher, Oliver; Stephan, Ralf; Hein, Matthias
Multimode frequency response of piezoelectric AlGaN/GaN micro-electromechanical RF resonators. - In: Technical digest, (2008), S. 165-168
Multimode frequency response of piezoelectric AlGaN/GaN micro-electromechanical RF resonators. - In: Technical digest, (2008), S. 165-168
Niebelschütz, Florentina; Pezoldt, Jörg; Stauden, Thomas; Cimalla, Volker; Tonisch, Katja; Brückner, Klemens; Hein, Matthias; Ambacher, Oliver; Schober, Andreas
Isotropic dry-etching of SiC for AlGaN/GaN MEMS fabrication. - In: Conference on Optoelectronic and Microelectronic Materials and Devices, 2008, ISBN 978-1-4244-2716-1, (2008), S. 26-29
http://dx.doi.org/10.1109/COMMAD.2008.4802084
Isotropic dry-etching of SiC for AlGaN/GaN MEMS fabrication. - In: Conference on Optoelectronic and Microelectronic Materials and Devices, 2008, ISBN 978-1-4244-2716-1, (2008), S. 26-29
http://dx.doi.org/10.1109/COMMAD.2008.4802084
Hauguth-Frank, Sindy; Lebedev, Vadim; Tonisch, Katja; Romanus, Henry; Kups, Thomas; Büchner, Hans-Joachim; Jäger, Gerd; Ambacher, Oliver; Schober, Andreas
Structural and photoconducting properties of MBE and MOCVD grown III-nitride double-heterostructures. - In: Materials and devices for laser remote sensing and optical communication, ISBN 978-1-60511-046-2, (2008), S. 155-161
Structural and photoconducting properties of MBE and MOCVD grown III-nitride double-heterostructures. - In: Materials and devices for laser remote sensing and optical communication, ISBN 978-1-60511-046-2, (2008), S. 155-161
Brückner, Klemens; Niebelschütz, Florentina; Tonisch, Katja; Michael, Steffen; Dadgar, Armin; Krost, Alois; Cimalla, Volker; Ambacher, Oliver; Stephan, Ralf; Hein, Matthias
Two-dimensional electron gas based actuation of piezoelectric AlGaN/GaN microelectromechanical resonators. - In: Applied physics letters, ISSN 1077-3118, Bd. 93 (2008), 17, S. 173504, insges. 3 S.
http://dx.doi.org/10.1063/1.3002296
Two-dimensional electron gas based actuation of piezoelectric AlGaN/GaN microelectromechanical resonators. - In: Applied physics letters, ISSN 1077-3118, Bd. 93 (2008), 17, S. 173504, insges. 3 S.
http://dx.doi.org/10.1063/1.3002296