Polster, Tobias;
Hoffmann, Martin; Albrecht, Arne; Tonisch, Katja; Ambacher, Oliver; Stauden, Thomas; Donahue, Mary; Michael, Steffen
AlN as a piezoelectric material for integrated micro and nano sensors on silicon. - In: Smart Systems Integration 2007, (2007), S. 249-255
AlN as a piezoelectric material for integrated micro and nano sensors on silicon. - In: Smart Systems Integration 2007, (2007), S. 249-255
Brückner, Klemens; Cimalla, Volker; Niebelschütz, Florentina; Stephan, Ralf; Tonisch, Katja; Ambacher, Oliver; Hein, Matthias A.
Strain- and pressure-dependent RF response of microelectromechanical resonators for sensing applications. - In: Journal of micromechanics and microengineering, ISSN 1361-6439, Bd. 17 (2007), 10, S. 2016-2023
http://dx.doi.org/10.1088/0960-1317/17/10/013
Strain- and pressure-dependent RF response of microelectromechanical resonators for sensing applications. - In: Journal of micromechanics and microengineering, ISSN 1361-6439, Bd. 17 (2007), 10, S. 2016-2023
http://dx.doi.org/10.1088/0960-1317/17/10/013
Lebedev, Vadim; Cengher, Dorin; Fischer, Michael; Tonisch, Katja; Cimalla, Volker; Niebelschütz, Merten; Ambacher, Oliver
Fabrication of one-dimensional "trenched" GaN nanowires and their interconnections. - In: Physica status solidi, ISSN 1862-6319, Bd. 204 (2007), 10, S. 3387-3391
http://dx.doi.org/10.1002/pssa.200723163
Fabrication of one-dimensional "trenched" GaN nanowires and their interconnections. - In: Physica status solidi, ISSN 1862-6319, Bd. 204 (2007), 10, S. 3387-3391
http://dx.doi.org/10.1002/pssa.200723163
Tonisch, Katja; Cimalla, Volker; Niebelschütz, Florentina; Romanus, Henry; Eickhoff, Martin; Ambacher, Oliver
Fully unstrained GaN on sacrificial AlN layers by nano-heteroepitaxy. - In: Physica status solidi, ISSN 1610-1642, Bd. 4 (2007), 7, S. 2248-2251
http://dx.doi.org/10.1002/pssc.200674813
Fully unstrained GaN on sacrificial AlN layers by nano-heteroepitaxy. - In: Physica status solidi, ISSN 1610-1642, Bd. 4 (2007), 7, S. 2248-2251
http://dx.doi.org/10.1002/pssc.200674813
Cimalla, Volker; Niebelschütz, Florentina; Tonisch, Katja; Förster, Christian; Brückner, Klemens; Cimalla, Irina; Friedrich, Thomas; Pezoldt, Jörg; Stephan, Ralf; Hein, Matthias
Nanoelectromechanical devices for sensing applications. - In: Sensors and actuators, ISSN 0925-4005, Bd. 126 (2007), 1, S. 24-34
http://dx.doi.org/10.1016/j.snb.2006.10.049
Nanoelectromechanical devices for sensing applications. - In: Sensors and actuators, ISSN 0925-4005, Bd. 126 (2007), 1, S. 24-34
http://dx.doi.org/10.1016/j.snb.2006.10.049
Cimalla, Irina Nicoleta; Will, Florentina; Tonisch, Katja; Niebelschütz, Merten; Cimalla, Volker; Lebedev, Vadim; Kittler, Gabriel; Himmerlich, Marcel; Krischok, Stefan; Schäfer, Jürgen A.; Gebinoga, Michael; Schober, Andreas; Friedrich, Thomas; Ambacher, Oliver
AlGaN/GaN biosensoreffect of device processing steps on the surface properties and biocompatibility. - In: Sensors and actuators, ISSN 0925-4005, Bd. 123 (2007), 2, S. 740-748
http://dx.doi.org/10.1016/j.snb.2006.10.030
AlGaN/GaN biosensoreffect of device processing steps on the surface properties and biocompatibility. - In: Sensors and actuators, ISSN 0925-4005, Bd. 123 (2007), 2, S. 740-748
http://dx.doi.org/10.1016/j.snb.2006.10.030
Wang, Chunyu; Lebedev, Vadim; Cimalla, Volker; Kups, Thomas; Tonisch, Katja; Ambacher, Oliver
Structural studies of single crystalline In2O3 films epitaxially grown on InN(0001). - In: Applied physics letters, ISSN 1077-3118, Bd. 90 (2007), 22, S. 221902, insges. 3 S.
http://dx.doi.org/10.1063/1.2743907
Structural studies of single crystalline In2O3 films epitaxially grown on InN(0001). - In: Applied physics letters, ISSN 1077-3118, Bd. 90 (2007), 22, S. 221902, insges. 3 S.
http://dx.doi.org/10.1063/1.2743907
Tonisch, Katja; Weise, Frank; Stubenrauch, Mike; Cimalla, Volker; Ecke, Gernot; Will, Florentina; Romanus, Henry; Mrotzek, Susanne; Hofmeister, H.; Hoffmann, Martin; Hülsenberg, Dagmar; Ambacher, Oliver
Growth of silicon nanowires on UV-structurable glass using self-organized nucleation centres. - In: Physica, ISSN 1386-9477, Bd. 38 (2007), 1/2, S. 40-43
http://dx.doi.org/10.1016/j.physe.2007.01.001
Growth of silicon nanowires on UV-structurable glass using self-organized nucleation centres. - In: Physica, ISSN 1386-9477, Bd. 38 (2007), 1/2, S. 40-43
http://dx.doi.org/10.1016/j.physe.2007.01.001
Tonisch, Katja; Cimalla, Volker; Will, Florentina; Weise, Frank; Stubenrauch, Mike; Albrecht, Arne; Hoffmann, Martin; Ambacher, Oliver
Nanowire-based electromechanical biomimetic sensor. - In: Physica, ISSN 1386-9477, Bd. 37 (2007), 1/2, S. 208-211
http://dx.doi.org/10.1016/j.physe.2006.06.002
Nanowire-based electromechanical biomimetic sensor. - In: Physica, ISSN 1386-9477, Bd. 37 (2007), 1/2, S. 208-211
http://dx.doi.org/10.1016/j.physe.2006.06.002
Lebedev, Vadim; Tonisch, Katja; Niebelschütz, Florentina; Cimalla, Volker; Cengher, Dorin; Cimalla, Irina Nicoleta; Mauder, Christof; Hauguth, Sindy; Ambacher, Oliver; Morales Sánchez, Francisco Miguel; Lozano, Juan Gabriel; González, David
Coalescence aspects of III-nitride epitaxy. - In: Journal of applied physics, ISSN 1089-7550, Bd. 101 (2007), 5, 054906, insges. 12 S.
https://doi.org/10.1063/1.2464195
Coalescence aspects of III-nitride epitaxy. - In: Journal of applied physics, ISSN 1089-7550, Bd. 101 (2007), 5, 054906, insges. 12 S.
https://doi.org/10.1063/1.2464195