TU Ilmenau


In order to cover all stages of the process chain of micro- and nanotechnologies, the ZMN aims to enable the detailed analytical investigation and characterization of systems in the micro- and nano range. Our analytical instruments thus complement the research tools and activities made possible by our other technologies. In addition to classical material and nanoanalytics (SEM, TEM, AFM, ...) and physical-optical analytics (ellipsometry, UV-Vis, Raman spectroscopy), the ZMN has both the capabilities of electronic characterization and a range of spectroscopic analysis methods from the field of biological-chemical analytics.

Analytical systems (down to atomic resolution)