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Maria Illing
Speaker ZMN
ZMN/Feynmanbau Raum 304
Tel. +49 3677-69 3400
For the processing of scientific topics in the three major research areas of the Institute of Micro- and Nanotechnologies - Micro-Nano-Integration, Materials for Micro- and Nanotechnologies and 3D-Biosystems - the ZMN has several process lines with extensive technical equipment. High-performance analysis down to the atomic scale rounds off the scientific equipment.