The Center of Micro- and Nanotechnologies is the largest technological center of the TU Ilmenau. As a technology platform of the Institute of Micro- and Nanotechnologies it forms the basis for both basic and applied research in the field of micro- and nanotechnologies as well as material sciences at our university. In two high-tech buildings, the ZMN has 1.800 m² of laboratory space, including 1,200 m² of clean room space with highly specialized facilities and equipment. In addition, there are special laboratories, for example for working with biological samples (safety level S1), the analytical laboratories or laboratories for high-precision measurement technology, which allows accuracies in the nanometer range. The ZMN, which has been funded by the DFG as an equipment center since 2013, also makes its excellent equipment and scientific expertise available to universities, research institutes and companies. at their disposal.