Google Search
Maria Illing
Speaker ZMN
ZMN/Feynmanbau Raum 304
Tel. +49 3677-69 3400
Lithography is the core technology of every research institution in the field of micro- and nanotechnologies. The Centre of Micro- and Nanotechnologies provides lithography solutions for a variety of complex structuring requirements.
In addition to classical photolithography with mask and mask aligner solutions, a variety of nanolithography solutions are available. These include a highly developed e-beam lithography system for writing ultra-fine patterns, fast direct laser writing tools and a nanoimprint process.