Lithography is the core technology of every research institution in the field of micro- and nanotechnologies. The Centre of Micro- and Nanotechnologies provides lithography solutions for a variety of complex structuring requirements.

In addition to classical photolithography with mask and mask aligner solutions, a variety of nanolithography solutions are available. These include a highly developed e-beam lithography system for writing ultra-fine patterns, fast direct laser writing tools and a nanoimprint process.