Ultrastable metrology laser at 633 nm using an optical frequency comb. - In: Optical Micro- and Nanometrology VII, (2018), 106780S, insges. 12 S.
https://doi.org/10.1117/12.2306907
Unsicherheit der simulierten Fixpunktemperatur von In, Sn und Zn in einer kleinen Mehrfachfixpunktzelle für Kalibrierung von Berührungsthermometern. - In: Sensoren und Messsysteme, (2018), S. 398-401
Bilateraler Vergleich der Messunsicherheit bei der Ermittlung dynamischer Kennwerte von Berührungsthermometern in Fluiden. - In: Sensoren und Messsysteme, (2018), S. 276-279
Prüfeinrichtung zur Untersuchung des dynamischen Verhaltens von Berührungsthermometern in Wasser. - In: Sensoren und Messsysteme, (2018), S. 273-275
Kalibrierung von Thermometern in situ im Prozess. - In: Sensoren und Messsysteme, (2018), S. 219-222
Measurement module based on a common-path Fabry-Perot interferometer for determining three-degree-of-freedom motion parameters. - In: Proceedings of the 18th International Conference of the European Society for Precision Engineering and Nanotechnology, (2018), S. 115-116
Torsion balance-based system for high-precision force measurement in horizontal plane: part I : development concept. - In: Measurement science and technology, ISSN 1361-6501, Bd. 29 (2018), 8, S. 084001, insges. 12 S.
https://doi.org/10.1088/1361-6501/aaba1f
The implementation of ultra precision rotations to multiaxial nanofabrication machines: challenges and solution concepts. - In: Proceedings of the 18th International Conference of the European Society for Precision Engineering and Nanotechnology, (2018), S. 65-66
Existing long-range nanopositioning and nanomeasuring machines are based on three independent linear movements in a Cartesian coordinate system. This in combination with the specific nature of sensors and tools (further on summarized as tool) limits the addressable part geometries. This article contributes to the enhancement of multiaxial machine structures by the implementation of rotational movements while keeping the precision untouched. A parameter based dynamic evaluation system with quantifiable technological parameters has been set up and employed to identify general solution concepts and adequate substructures. First evaluations show high potential for sample scanning mode variants considering linear movements of the object in combination with angular movements of the tool, considering a goniometer setup in specific. The evaluation system is further enhanced by the implementation of data based on comprehensive design catalogues, uncertainty calculations and CAD-model based footprint analysis for specific setups. To support the selection, detailed parameter sets are generated containing explicit moving ranges, uncertainties, resolutions, reproducibilities and costs. This approach is also applied to the rotation of the object. The results are compared to the tool rotation and mixed versions. After all, the knowledge gained, is formed into general rules for the verification and optimization of design solutions for multiaxial nanopositioning machines.
Digital frequency offset-locked He-Ne laser system with high beat frequency stability, narrow optical linewidth and optical fibre output. - In: Measurement science and technology, ISSN 1361-6501, Bd. 29 (2018), 6, S. 064013, insges. 13 S.
https://doi.org/10.1088/1361-6501/aab987
The Planck-Balance - using a fixed value of the Planck constant to calibrate E1/E2-weights. - In: Measurement science and technology, ISSN 1361-6501, Bd. 29 (2018), 7, S. 074003, insges. 9 S.
https://doi.org/10.1088/1361-6501/aabc9e