The research unit aims to combine fundamental research into highly-accurate optical measurement technology with application-based research, often in collaboration with interdisciplinary partners. Furthermore, technology transfer all the way to the practical use is actively pursued.

Interferometric signal processing stands at the heart of the research profile and is applied to a number of key application fields. Nanometrology and sensor technology, in particular for use within nanofabrication, forms the core application area. Fibre-optic sensing and interferometric imaging are further key target areas and innovative research topics to advance the research profile are continuously being explored.