Zeitschriftenaufsätze und Buchbeiträge

Phase transition temperatures can be used for thermometer calibrations in accordance with the ITS-90. For this the thermometer is inserted into a fixed-point cell filled with a highly pure substance. While the substance is melting or freezing the temperature inside the cell remains almost constant and the thermometer measures a plateau in the temperature curve. From this plateau the phase transition temperature needs to be estimated for the calibration of the thermometer. This can be done using different mathematical methods, taking into account various systematic deviations as well as reproducibilities of the results depending on the chosen method, the fixed-point material's purity and above all the amount of fixed-point material. Hence this article presents results from measurements in miniature fixed-point cells filled with zinc of various purities. The plateau curves were measured at different heating rates and comparatively analysed using five different estimation methods.

The paper describes traceable nanometrology based on a nanopositioning machine with integrated nanoprobes. The operation of a high-precision long range three-dimensional nanopositioning and nanomeasuring machine (NPM-Machine) having a resolution of 0,1 nm over the positioning and measuring range of 25 mm x 25 mm x 5 mm is explained. An Abbe offset-free design of three miniature plan mirror interferometers and applying a new concept for compensating systematic errors resulting from mechanical guide systems provide very small uncertainties of measurement. The NPM-Machine has been developed by the Institute of Process Measurement and Sensor Technology of the Technische Universität Ilmenau and manufactured by the SIOS Messtechnik GmbH Ilmenau. The machines are operating successfully in several German and foreign research institutes including the Physikalisch-Technische Bundesanstalt (PTB), Germany. The integration of several, optical and tactile probe systems and nanotools makes the NPM-Machine suitable for various tasks, such as large-area scanning probe microscopy, mask and wafer inspection, nanostructuring, biotechnology and genetic engineering as well as measuring mechanical precision workpieces, precision treatment and for engineering new material. Various developed probe systems have been integrated into the NPM-Machine. The measurement results of a focus sensor, metrological AFM, white light sensor and tactile stylus probes are presented. Single beam-, double beam- and triple beam interferometers built in the NPM-Machine for six degrees of freedom measurements are described.