Zeitschriftenaufsätze und Buchbeiträge

The nanopositioning and nanomeasuring machine developed at the Ilmenau University of Technology was originally designed for surface measurements within a measuring volume of 25 mm × 25 mm × 5 mm. The interferometric length measuring and drive systems make it possible to move the stage with a resolution of 0.1 nm and a positioning uncertainty of less than 10 nm in all three axes. Various measuring tasks are possible depending on the installed probe system. Most of the sensors utilized are one-dimensional surface probes; however, some tasks require measuring sidewalls and other three-dimensional features. A new control system, based on the I++ DME specification, was implemented in the device. The I++ DME scan functions were improved and special scan functions added to allow advanced three-dimensional scan methods, further fulfilling the demands of scanning force microscopy and micro-coordinate measurements. This work gives an overview of these new functions and the application of them for several different measurements.

Continuing growth of the market for micro and nano system technologies is driven by increasing needs for components functionality for the automotive and consumer-oriented market. The cutting-edge technology comes for this market from the semiconductor industry, the biggest driver for the nano world.

Continuously increasing demands on nanopositioning and nanomeasuring (NPM) machines require a detailed analysis of and a decrease in measurement uncertainty. Initial studies have been done in the field of length and angle measurement. The analysis resulted in updated assemblies, which were investigated further. Significant improvements in mechanical stability, drift behaviour and temperature dependence were produced. To minimize the undesired heat production by the non-self-locking vertical linear drive systems, an improved weight force compensation arrangement adaptable to different object masses was developed and tested. Also, the system's natural frequencies were analysed. A modified structure with increased stiffness of the vertical drive system was designed to improve the NPM's dynamic behaviour.