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Prof. Dr. Eberhard Manske
Head of Department for Production and Precision Measurement Technology, Head of Institute for Process Measurement and Sensor Technology
69-1250, -5050
Prof. Eberhard Manske
Production and Precision Measurement Technology
Phone: +49 3677 69-5050
e-mail:eberhard.manske@tu-ilmenau.de
In the research training group NanoFab, work has been successfully carried out since 2017 on the fundamentals for the systematic application of precision strategies to nanofabrication processes. Here, new nanofabrication techniques, e.g. special additive processes and nanomanipulation techniques, are investigated for their potential. By means of the device applied for, the previous limits of patterning can be pushed down to the atomic scale. The aim is also to penetrate areas and applications of quantum technology ( e.g. single electron transistors).