Atomic resolution scanning ion microscopy and lithography workstation

Contact person

Prof. Eberhard Manske
Production and Precision Measurement Technology

Phone: +49 3677 69-5050

Funding information

Project leader: Thüringer Aufbaubank (TAB)

Project number: 2021 FGI 0031

Participating groups: Production and Precision Measurement Technology

Period of funding: 01.10.2021 - 30.06.2023

Project information

In the research training group NanoFab, work has been successfully carried out since 2017 on the fundamentals for the systematic application of precision strategies to nanofabrication processes. Here, new nanofabrication techniques, e.g. special additive processes and nanomanipulation techniques, are investigated for their potential. By means of the device applied for, the previous limits of patterning can be pushed down to the atomic scale. The aim is also to penetrate areas and applications of quantum technology ( e.g. single electron transistors).