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Univ.-Prof. Dr.-Ing. habil. Kai-Uwe Sattler
President
Tel. +49 3677 69-5001
Ernst-Abbe-Zentrum, Ehrenbergstraße 29
Zi. 3322
Molecular beam epitaxy (MBE)
Device: SSMBE-device UMS 500 (Balzers AG)
Technical data
Auger electron spectroscopy (AES)
Device: Auger electron spectrometer Microlab 350
Technical data
Metal organic chemical vapor deposition (MOCVD)
Device: AIX 200 (Aixtron AG)
Technical data
Plasma etching tool
Device: Multiplec ICP
Technical data
Electron beam lithography
Device: Raith 150
Technical data
X-Ray diffractometer (HXRD)
Device: D8 DISCOVER High resolution X-Ray diffractometer
Technical data
Scanning electron microscopy
Device: Zeiss GEMINI 500
Technical data
Desorption measurement
Device: Desorption measurment tool (self-build)
Technical data
Ellipsometer
Device: Sentech SE 900 FT-IR Ellipsometer
Device: Sentech SE 801 in situ Spectral ellipsometer
Device: Sentech CER Ellipsometer ex situ multi-angle ellipsometer with white light reflectometer
Technical data