Equipment

Molecular beam epitaxy (MBE)
Device: SSMBE-device UMS 500 (Balzers AG)
Technical data

Auger electron spectroscopy (AES)
Device: Auger electron spectrometer Microlab 350
Technical data

Metal organic chemical vapor deposition (MOCVD)
Device: AIX 200 (Aixtron AG)
Technical data

Plasma etching tool
Device: Multiplec ICP
Technical data

Electron beam lithography
Device: Raith 150
Technical data

X-Ray diffractometer (HXRD)
Device: D8 DISCOVER High resolution X-Ray diffractometer
Technical data

Scanning electron microscopy
Device: Zeiss GEMINI 500
Technical data

Desorption measurement
Device: Desorption measurment tool (self-build)
Technical data

Ellipsometer
Device: Sentech SE 900 FT-IR Ellipsometer
Device: Sentech SE 801 in situ Spectral ellipsometer
Device: Sentech CER Ellipsometer ex situ multi-angle ellipsometer with white light reflectometer
Technical data