The goal of the second generation is to even better combine highly localized and highly dynamic laser writing processes with the NPM technique, both in the plane and on curved surfaces. For this purpose, the second generation includes the implementation of a differential chromatic approach based on a high-frequency oscillating micromechanical pinhole using Lockin technology as a confocal sensor. Minimal structures are to be fabricated through a combination of improved laser beam focusing and a better understanding of the resist chemistry, which apparently allows patterning well below the Rayleigh criterion. Finally, nanometer-precision writing on large areas (25 mm x 25 mm) at high speeds will be demonstrated.
Project leader: Prof. Manske, Prof. Sinzinger