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Maria Illing
Speaker ZMN
ZMN/Feynmanbau Raum 304
Tel. +49 3677-69 3400
The clean rooms in the two high-tech buildings at the ZMN have a wide range of wet and dry etching processes. The wet chemistry allows cleaning and etching processes, lift-off or wet chemical stripping of resists. Furthermore, dry etching systems for controlled plasma etching are available.