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Müller, Jens; Kaltwasser, Mahsa; Bartsch, Heike; Behrens, Arne; Handte, Thomas; Wüster, Julian; Sinzinger, Stefan
Glass and glass/LTCC interposers as heterogenous integration platform. - In: IEEE Xplore digital library, ISSN 2473-2001, (2024), insges. 7 S.

Glass as substrate or interposer material is gaining more and more interest due to its thin film compatibility and thus high-density integration capability. Multilayer stacks for processor packaging applications can be achieved by laminating Ajinomoto build-up film (ABF) on glass substrates. Some glasses exhibit very frequency stable dielectric properties and low losses which makes glass substrates also favorable for microwave applications. Moreover, in contrast to silicon as interposer material, glass materials are cheaper, they can be processed in large panel format, they do not require deposition of insulating dielectric layers and they are available with different temperature coefficients of expansion (TCE). The latter was the pre-requisite to combine glasses with TCE-matching Low Temperature Cofired Ceramic (LTCC) materials to achieve an inorganic compound substrate offering both multilayer and thin-film capability in one substrate. In addition, the glass side of the interposer might be used for integrating photonic elements and components for mixed electronic/photonic applications. Green LTCC tapes are processed in the standard sequence up to the lamination step. In parallel, holes for vias are laser drilled in the glass and filled with thick-film conductor paste. The LTCC stack is then laminated onto the glass substrate and the laminate is fired according to sintering conditions of the LTCC. During firing, the sintered LTCC establishes a strong bond to the glass without the need of an extra bonding layer. This multilayer Tape-on-Substrate approach results in zero lateral shrinkage of the LTCC and therefore high lateral dimensional accuracy. After cleaning, the glass side can be used for semi-additive or additive conductor structuring. Thick-film printing on glass as well as printing of metal-organic pastes as basis for electroplating are demonstrated. This paper summarizes the achieved results on process development and interposer substrate evaluation comprising assembly technologies and high-frequency properties.

Hofmann, Meike; Gharbi Ghebjagh, Shima; Feng, Yuchao; Fan, Chao; Lemke, Karen; Sinzinger, Stefan
Linearly modulated multi-focal diffractive lens for multi-sheet excitation of flow driven samples in a light-sheet fluorescence microscope. - In: Journal of the European Optical Society, ISSN 1990-2573, Bd. 19 (2023), 1, 26, S. 1-8

Light sheet fluorescence microscope with single light sheet illumination enables rapid 3D imaging of living cells. In this paper we show the design, fabrication and characterization of a diffractive optical element producing several light sheets along a 45˚ inclined tube. The element, which is based on a multi-focal diffractive lens and a linear grating, generates five thin light sheets with equal intensities when combined with a refractive cylindrical lens. The generated uniform light sheets can be applied for the scanning of samples in tubes enabling flow-driven 3-dimensional imaging.

Gharbi Ghebjagh, Shima; Handte, Thomas; Sinzinger, Stefan
Micro-diffractive optical element arrays for beam shaping. - In: EOS Annual Meeting (EOSAM 2022), Bd. 266 (2022), 13013, S. 1-2

We describe the design of Fourier type array generators and beam shapers as periodic configurations of refractive-diffractive optical elements in microscale to provide specific beam shaping and imaging functionaliies. We investigate how the addition of micro-nanostructures to regular microstructure arrays enables new degrees of freedom for the design of micro-optical systems, in combination with adapted fabrication techniques yields a better optical performance and leads to enhancement of the array concept, uniformity and efficiency.

Wüster, Julian; Reetz, Andreas; Schmidt-Grund, Rüdiger; Knauer, Andrea; Sinzinger, Stefan
Approaches for the RCWA-based non-destructive characterization of subwavelength-structured gratings. - In: EOS Annual Meeting (EOSAM 2022), (2022), 05012, S. 1-2

Nano-structuring enables us to add additional degrees of freedom to the design of optical elements. Especially the possibility of controlling the polarization is of great interest in the field of nano-structured optics. For being able to exploit the whole range of form-birefringent phase shifts, the aspect ratios of the resulting element are typically much higher than the aspect ratios of conventional diffractive optical elements (DOEs), which does not only pose a challenge on fabrication but also on characterization. We evaluate several well-established approaches for the nondestructive characterization, including Müller-Matrix-Ellipsometry, measurement of the diffraction efficiencies, scattering measurements and calibration with rigorous coupled-wave modelling. The goal is to understand the challenges with all these techniques and combine them to a reliable method for structural reconnaisance of high aspect ratio nanostructures.

Weigel, Christoph; Sinzinger, Stefan; Hoffmann, Martin; Strehle, Steffen
Mikrostrukturierte Spezialgläser für mikromechanische und mikrooptische Anwendungen. - In: Mikrosystemtechnik, (2022), S. 35-38

Behrens, Arne; Sinzinger, Stefan
2.5D etching of silicon dioxide for optical and photonic structures. - In: 2022 IEEE Photonics Conference (IPC), (2022), insges. 2 S.

We investigated the ability to control the sidewall-angle for the etching of SiO2 by tuning process parameters. We found a strong correlation between sidewall-angle and temperature, enabling control of the sidewall-angle from 60˚-90˚, and found a curved etch profile which was named quasi-isotropic.

Handte, Thomas; Hofmann, Martin; Behrens, Arne; Sinzinger, Stefan
Manufacturing of nanostructures in silicon carbide using UV-nanoimprint lithography in combination with fluorine-based plasma etching. - In: 2022 IEEE Photonics Conference (IPC), (2022), insges. 2 S.

The combination of a multi-layer resist system for soft UV-NIL with a fluorine-based plasma etching is investigated to elaborate homogeneously distributed nanosized features in silicon carbide. Initial studies substantiate that this approach can be a timesaving and cost-effective alternative to generate nanostructures in SiC.

Gharbi Ghebjagh, Shima; Behrens, Arne; Feßer, Patrick; Sinzinger, Stefan
Tunable multi-focal diffractive lens. - [Washington, DC, USA] : Optica Publishing Group. - 1 Online-Ressource (Paper 3Th2D.2)

A specific combination of diffractive optical elements can form a tunable multi-focal diffractive lens generating an array of adjustable coaxial focal spots with uniform intensity distribution. The mutual rotation of the two cascaded diffractive grids provides a continuous adjustment of the optical power based on the Alvarez-Lohmann approach and a dynamic tuning of the foci distances.

Handte, Thomas; Bohm, Sebastian; Goj, Boris; Dittrich, Lars; Mollenhauer, Olaf; Sinzinger, Stefan; Runge, Erich
Simulation model and dimensioning of a photoacoustic sensor for the detection of radiation-induced pressure surges. - In: MikroSystemTechnik, (2021), S. 523-526

Behrens, Arne; Feßer, Patrick; Bosch, Martí; Hentschel, Martina; Sinzinger, Stefan
Whispering Gallery Resonators with diffractive coupling elements. - In: MikroSystemTechnik, (2021), S. 230-233