Jakobs, Stefan; Duparré, Angela; Truckenbrodt, Horst
AFM and light scattering measurements of optical thin films for applications in the UV spectral region. - In: International journal of machine tools & manufacture, Bd. 38 (1998), 5/6, S. 733-739
https://doi.org/10.1016/S0890-6955(97)00125-9
AFM and light scattering measurements of optical thin films for applications in the UV spectral region. - In: International journal of machine tools & manufacture, Bd. 38 (1998), 5/6, S. 733-739
Combination of atomic force microscopy and scattering measurements allows controlling the microstructure of substrates and optical thin films in the nanometer scale and of surface homogeneity over large areas. Results are presented of measurements on superpolished and conventionally polished substrates as well as on thin film fluoride coatings, demonstrating the capabilities of these measurement techniques.
https://doi.org/10.1016/S0890-6955(97)00125-9
Bischoff, Jörg; Truckenbrodt, Horst
New optical method for the measurement of sub-quarter-micron patterns in microtechnology. - In: Proceedings, (1998), S. 209-214
New optical method for the measurement of sub-quarter-micron patterns in microtechnology. - In: Proceedings, (1998), S. 209-214
Bischoff, Jörg; Hehl, Karl
Single feature metrology by means of light scatter analysis. - In: Metrology, inspection, and process control for microlithography XI, (1997), S. 574-585
Single feature metrology by means of light scatter analysis. - In: Metrology, inspection, and process control for microlithography XI, (1997), S. 574-585
Bischoff, Jörg; Truckenbrodt, Horst; Bauer, Joachim
Diffraction analysis based characterization of very fine gratings. - In: Micro-optical technologies for measurement, sensors, and microsystems II and optical fiber sensor technologies and applications, (1997), S. 212-222
Diffraction analysis based characterization of very fine gratings. - In: Micro-optical technologies for measurement, sensors, and microsystems II and optical fiber sensor technologies and applications, (1997), S. 212-222
Baumgart, Jörg; Truckenbrodt, Horst
Determination of the stochastic parameters of machined surfaces by scattered light. - In: Progress in precision engineering and nanotechnology, (1997), S. 199-201
Determination of the stochastic parameters of machined surfaces by scattered light. - In: Progress in precision engineering and nanotechnology, (1997), S. 199-201
Richter, Wolfgang;
Geometrische Optik und das Verhlten lichttechnischer Größen. - In: Tagungsberichte, (1997), S. 43-50
Geometrische Optik und das Verhlten lichttechnischer Größen. - In: Tagungsberichte, (1997), S. 43-50
Baumgart, Jörg; Bischoff, Jörg; Truckenbrodt, Horst
Untersuchung von Mikrostrukturen und Riefentexturen mit Streulicht. - In: Kongreßband, (1996), S. 179-184
Untersuchung von Mikrostrukturen und Riefentexturen mit Streulicht. - In: Kongreßband, (1996), S. 179-184
Bischoff, Jörg; Baumgart, Jörg W.; Truckenbrodt, Horst; Bauer, Joachim J.
Photoresist metrology based on light scattering. - In: Metrology, inspection, and process control for microlithography X, (1996), S. 678-689
Photoresist metrology based on light scattering. - In: Metrology, inspection, and process control for microlithography X, (1996), S. 678-689
Bischoff, Jörg; Baumgart, Jörg W.; Bauer, Joachim J.; Truckenbrodt, Horst
Light scattering based micrometrology. - In: Specification, production, and testing of optical components and systems, (1996), S. 251-262
Light scattering based micrometrology. - In: Specification, production, and testing of optical components and systems, (1996), S. 251-262
Richter, Wolfgang; Jahn, Rainer
Geometrisch-optische Theorie zur Messung von Körpern im Durchlicht. - In: Vortragsreihen, (1996), S. 556-561
Geometrisch-optische Theorie zur Messung von Körpern im Durchlicht. - In: Vortragsreihen, (1996), S. 556-561