Analytic

In order to cover all stages of the micro- and nanotechnology process chains, the ZMN aims to enable the detailed analytical investigation and characterization of systems in the micro- and nanoscale. Our analytical instruments thus complement the research instruments and activities made possible by our other technologies. The spectrum ranges from material and nanoanalysis (SEM, TEM, AFM, XRD...) to physical-optical analysis (ellipsometry, UV-Vis-IR spectroscopy, XPS...) and electrical characterization.