Publication list FG Nanotechnology

Anzahl der Treffer: 722
Erstellt: Sat, 27 Apr 2024 23:01:42 +0200 in 0.0486 sec


Jatal, Wael; Tonisch, Katja; Baumann, Uwe; Schwierz, Frank; Pezoldt, Jörg
GaN HEMTs on Si substrate with high cutoff frequency. - In: 2014 10th International Conference on Advanced Semiconductor Devices & Microsystems (ASDAM), ISBN 978-1-4799-5476-6, (2014), insges. 4 S.

We report on GaN HEMTs on Si substrates with high cutoff frequency and low contact resistance. HEMTs with two barriers designs and two source/drain metallization schemes have been fabricated and characterized. Our 100-nm gate transistors show a maximum drain current density of 1.4 A/mm and a peak transconductance of 427 mS/mm. The fastet transistors have a gate length of 80 nm and achieve a cutoff frequency fT of 180 GHz. This is the best fT performance reported for GaN HEMTs on Si reported so far and rivals the fastest GaN HEMTs on SiC with comparable gate length.



http://dx.doi.org/10.1109/ASDAM.2014.6998660
Stubenrauch, Mike; Hanitsch, Stefan; Fischer, Robert; Bartsch, Heike; Straube, Anja; Hoffmann, Martin; Witte, Hartmut
BioMEMS for analysis and synthesis in life sciences. - In: Biomedical engineering, ISSN 1862-278X, Bd. 59.2014, Suppl. 1, S. S127

http://dx.doi.org/10.1515/bmt-2014-5001
Fang, Jun; Park, Se-Chul; Schlag, Leslie; Stauden, Thomas; Pezoldt, Jörg; Jacobs, Heiko O.
Active matrix-based collection of airborne analytes: an analyte recording chip providing exposure history and finger print. - In: Advanced materials, ISSN 1521-4095, Bd. 26 (2014), 45, S. 7600-7607

https://doi.org/10.1002/adma.201402589
Fang, Jun; Park, Se-Chul; Schlag, Leslie; Stauden, Thomas; Pezoldt, Jörg; Jacobs, Heiko O.
Localized collection of airborne analytes: a transport driven approach to improve the response time of existing gas sensor designs including SERS based detection of small molecules. - In: Mikro-Nano-Integration, (2014), S. 62-65

We describe a new transport mechanism that supports the localized collection of airborn analytes at higher rates when compared to diffusion based standard commonly used. It combines advanced aerosol science with novel nanosensor designs. Background: The detection of single molecular binding events has been a recent trend in sensor research introducing various sensor designs where the active sensing elements are nanoscopic in size. While it is possible to detect single binding events, the research has not yet addressed the question of how to effectively transport airborne analytes to these point-like sensing structures. Currently, diffusion-only-transport is used and it becomes increasingly unlikely for an analyte molecule to “find” and interact with sensing structures where the active area is shrunk in size, trading an increased sensitivity with a long response time. Approach: Instead of using diffusion-only-transport, this report introduces various analyte charging methods and electrodynamic nanolens based analyte concentration concepts to transport airborne analytes to nanoscopic sensing points to improve the response time of existing gas sensor designs. We demonstrate localized collection of analytes over a wide range of molecular weights ranging from 3×1017 to 1×102 Daltons, including (i) microscopic analyte particles, (ii) inorganic nanoparticles, all the way down to (iii) small organic molecules. We also demonstrate first experimental results towards an programmable active matrix based analyte collection approach referred to as "Airborn Analyte Memory Chip/Recorder" for "OFFSITE" analyte analysis, which (i) takes samples of the particles or molecules in an Aerosol at specific points in time, (ii) transports the analyte sample to a designated spot on a surface, (iii) concentrates the analyte at this spot to achieve an amplification, (iv) repeats this sequence until the recording matrix is full, and (v) reads out the analyte matrix on the chip. Implications: In all cases we find that the collection rate is several orders of magnitudes higher than in the case where the discovered collection schemes is turned off and where collection is driven by diffusion-only-transport. The collection scheme is integrated on an existing surface-enhanced Raman spectroscopy based sensor. In terms of response time, the process is able to detect analytes at 9 parts per million within 1 second. As a comparison, 1 hour is required to reach the same signal level when diffusion-only-transport is used. The novel "Airborn Analyte Memory Chip/Recorder" achieved by this approach could be a commodity item that is placed in an environment that a user would like to keep a record from. The information is retrieved on an as needed basis. Offsite analysis of the chip storing the information would make this approach more economical than an online monitoring system for all kinds of threads.



Park, Se-Chul; Fang, Jun; Biswas, Shantonu; Kaltwasser, Mahsa; Stauden, Thomas; Jacobs, Heiko O.
Automated reel-to-reel fluidic self-assembly enabling the production of solid state lighting panels. - In: Mikro-Nano-Integration, (2014), S. 124-126

We report the implementation of a first automated reel-to-reel fluidic self-assembly system based on surface tension driven self-assembly for macroelectronics application. The reported system incorporates precisely controlled and automated agitation, web moving and component recycling and dispensing system and enables continuous parallel assembly of semiconductor chips at a high rate (15k chips per hour using 2.5 cm wide web) and assembly yield (>99%) under optimal condition. In principle, scaling to any throughput should be possible considering the parallel nature of self-assembly. The system was carefully optimized to accomplish defect free assembly with computations and comparisons of the relevant forces under various operation conditions. The process overcomes the limitations on area and throughput of prior methods. It provides a new platform for macroelectronics to enable the integration of microscopic high performance inorganic semiconductors on flexible or stretchable substrates with any desired location, pitch, and integration density. As an example we demonstrate the fabrication of a solid state area lighting panel.



Cimalla, Volker; Baeumler, Martina; Kirste, Lutz; Prescher, M.; Christian, B.; Passow, Thorsten; Benkhelifa, Fouad; Bernhardt, F.; Eichapfel, Georg; Himmerlich, Marcel
Densification of thin aluminum oxide films by thermal treatments. - In: Materials sciences and applications, ISSN 2153-1188, Bd. 5 (2014), 8, S. 628-638

Thin AlOx films were grown on 4H-SiC by plasma-assisted atomic layer deposition (ALD) and plasma assisted electron-beam evaporation at 300˚C. After deposition, the films were annealed in nitrogen at temperatures between 500˚C and 1050˚C. The films were analyzed by X-ray reflectivity (XRR) and atomic force microscopy (AFM) in order to determine film thickness, surface roughness and density of the AlOx layer. No differences were found in the behavior of AlOx films upon annealing for the two different employed deposition techniques. Annealing results in film densification, which is most prominent above the crystallization temperature (800˚C). In addition to the increasing density, a mass loss of ˜5% was determined and attributed to the presence of aluminum oxyhydroxide in as deposited films. All changes in film properties after high temperature annealing appear to be independent of the deposition technique.



http://dx.doi.org/10.4236/msa.2014.58065
Park, Se-Chul; Fang, Jun; Biswas, Shantonu; Kaltwasser, Mahsa; Stauden, Thomas; Jacobs, Heiko O.
A first implementation of an automated reel-to-reel fluidic self-assembly machine. - In: Advanced materials, ISSN 1521-4095, Bd. 26 (2014), 34, S. 5942-5949

A first automated reel-to-reel fluidic selfassembly process for macroelectronic applications is reported. This system enables high-speed assembly of semiconductor dies (15 000 chips per hour using a 2.5 cm-wide web) over large-area substrates. The optimization of the system (>99% assembly yield) is based on identification, calculation, and optimization of the relevant forces. As an application, the production of a solid-state lighting panel is discussed, involving a novel approach to apply a conductive layer through lamination.



http://dx.doi.org/10.1002/adma.201401573
Hähnlein, Bernd; Schaaf, Peter; Schaaf, Peter *1963-*;
Size effect of Young's modulus in AlN thin layers. - In: Journal of applied physics, ISSN 1089-7550, Bd. 116 (2014), 12, 124306, insges. 4 S.

https://doi.org/10.1063/1.4896496
Konkin, Alexander; Ritter, Uwe; Scharff, Peter; Schrödner, Mario; Sensfuss, Steffi; Aganov, Albert; Klochkov, V.; Ecke, Gernot
Improvement of P3HT-ICBA solar cell photovoltaic characteristics due to the incorporation of the maleic anhydride additive: P3HT morphology study of P3HT-ICBA and P3HT-ICBA-MA films by means of X-band LESR. - In: Synthetic metals, Bd. 197 (2014), S. 210-216

http://dx.doi.org/10.1016/j.synthmet.2014.09.012
Hanitsch, Stefan; Hampl, Jörg; Fischer, Robert; Tobola, Justyna; Stubenrauch, Mike; Schober, Andreas; Witte, Hartmut; Hoffmann, Martin
Integration of hydrogels into BioMEMS. - In: Shaping the future by engineering, (2014), insges. 9 S.