Precision optical measurement methods are used in research, development, and industry. They are applied in investigations, research, further development, and calibrations, as well as for the high-precision control and regulation of industrial systems (e.g., lithographic production systems). A large portion of these applications involves measurements under atmospheric conditions, with measurement durations ranging from several hours to days, often under environmental conditions that are difficult to control.
This project investigates approaches to stabilizing the refractive index and density of air, which is intended to reduce environmental measurement uncertainties and may contribute to an increase in the possible measurement dynamic range. The research results are intended to directly enable improvements in precision optical measurements and optical systems. However, research in this area is also intended to open up new fields of application that currently do not use interferometers or other precision optical measurement systems due to environmental influences, or for which precise gravimetric measurements under vacuum conditions are not economically viable.
References:
Method and apparatus for the active stabilization of the gas refractive index and gas density, respectively, in a sealed measurement chamber, Patent DE102022112470, EP4280017A1
Funding Agency:
Thuringian Ministry of Economics, Science, and Digital Society, with financial support from the European Union
Project Duration: January 1, 2024 – December 31, 2026
Grant Reference Number: 2023 VFE 0004
