History

1955
Foundation of the "Institute for General and Optical Metrology" at the Faculty of Precision Mechanics and Optics
Head of Institute: Prof. Dr. phil. Otto Dobenecker
Research focus: precision metrology

1961
Prof. Dr. -Ing. Paul G. Michelsson becomes head of the "Institute for General and Optical Metrology"
Research focus: Operational metrology; electrical measurement of non-electrical quantities

1968
Under the direction of Prof. Michelsson, the institute was integrated as a department of "Process Metrology" into the newly founded section of "Technical and Biomedical Cybernetics"
Research focus: through cooperation with the other departments of the section: integration of information processing, computer technology, circuit technology, and control engineering

1981
Prof. Dr. -Ing. habil. Gerd Jäger takes over the management of the department, which receives the designation "Process Measurement and Sensor Technology" due to the expansion of the profile.
Research foci: Sensor technology; laser nano-measurement technology; optoelectronics; dynamic force and temperature measurement

1988
Prof. Dr.-Ing. habil. Rainer Grünwald is appointed associate professor and works as a university lecturer in the scientific field of process measurement and sensor technology at the TH Ilmenau

1990
Foundation of the "Institute for Process Measurement and Sensor Technology" at the "Faculty of Computer Science and Automation"
Institute director: Prof. Dr.-Ing. habil. Gerd Jäger

1992
Integration of the "Institute for Process Measurement and Sensor Technology" into the "Faculty of Mechanical Engineering"
Head of Institute: Prof. Dr.-Ing. habil. Gerd Jäger

2002
Confirmation of the Collaborative Research Center SFB 622 "Nanopositioning and Nanometrology Machines" under the leadership of the Institute of Process Measurement and Sensor Technology

2008
Appointment of Prof. Dr.-Ing. Eberhard Manske for the endowed professorship "Precision Measurement Technology

2009
After the transfer of Univ.-Prof. Dr.-Ing. habil. Prof. h.c. Dr. h.c. mult. Gerd Jäger into retirement in March 2009 Prof. Grünwald takes over the institute management

2009
Univ.-Prof. Dr.-Ing. habil. Thomas Fröhlich is appointed as successor of Prof. Jäger in the field of process measurement technology.

2010
Univ.-Prof. Dr.-Ing. habil. Thomas Fröhlich takes over the management of the institute after Univ.-Prof. Dr.-Ing. habil. Rainer Grünwald has retired

2017
Start of the research training group NanoFab

2019
Prof. Fröhlich becomes dean of the faculty of mechanical engineering, Prof. Manske takes over the institute management