Microsystems Technology Group Am Helmholtzring 12 (Werner-Bischoff-Bau room 3110) 98693 Ilmenau
Phone: +49 3677 69-2485 Fax: +49 3677 69-1801
To achieve further improvements in the performance of the NanoFab nanopositioning devices, new approaches for dynamic deformation and vibration measurement are required. In this project, highly dynamic position and angle measurement by means of fibre-optic interferometry shall be developed to measure dynamic changes in tool alignment and positioning
in a highly dynamic manner to determine position and angle changes between tool and workpiece for enabling a readjustment. An important sub-task is the metrological qualification of the fibre measurement system, especially with regard to its long- term stability.
Forces in the range of less than 1 mN can be generated electromagnetically, electrostatically and optically. However, there is a well repeatable but unknown discrepancy between electromagnetically and electrostatically generated forces, which shall be investigated in this project. This requires a systematic metrological investigation of different calibration methods and a comparison to forces generated by other means. The application within NanoFab is the development of a force measurement set-up for investigating force-displacement characteristics of microcantilevers for scanning probe techniques.
electromagnetic, electrostatic and optic force compensation