• Directly to the main menu
  • Directly to the content
  • Directly to the footer
Google Search
×
 
  • University
    • Kompass mit einer roten Nadel, die nach Norden zeigt Profile
      • Portrait and Mission Statement
      • Sustainability
      • Structure and Contact Persons
      • Facts and Figures
      • References and Awards
      • Campus and Directions
      • Statutes and Regulations
    • Departments
      • Department of Electrical Engineering and Information Technology
      • Department of Computer Science and Automation
      • Department of Mechanical Engineering
      • Department of Mathematics and Natural Sciences
      • Department of Economic Sciences and Media
    • Mann mit Aktenkoffer steigt lange Treppe hoch Career
      • Working at the TU Ilmenau
      • Scientific Career
      • Vacancies
      • Professional Training
      • Scholarships and Foundations
    • Pressemitteilung Media and News
      • Press Releases
      • Events
      • Publications
      • Photos and Videos
      • Press Officer
    • Quicklinks
      • University Library
      • University Computing Centre
      • University Sports Centre
      • Division of Equality, Diversity & Health
      • Quality Management
      • TU Ilmenau Transfer GmbH
      • Central Institute for Education
      • Uni Shop
      • University Society
      • Corona Information
      • Intranet
  • Study
    • Before the study
      • Range of courses
        • Bachelor
        • Master
        • Application
        • Study Preparation
        • FAQ Application/Enrollment
      • Experience university
        • Events
        • Fair calendar
        • Campus visit
        • Student Research Centre
      • Studentin schaut auf Stadtplan Start of studies
        • Studies Advisory Service
        • First steps
        • Living and Financing
        • Studying with disabilities
        • Health and family
      • Student Life
        • Culture
        • Sports
        • Associations and initiatives
        • Student Representation
        • Ilmenau
        • Thuringia
      • Before the study
        • Applicant portal
        • Admission requirements
        • Student advisory service
        • Courses
        • Double degrees
        • Study abroad
        • Study Preparation
        • Voluntary Year
        • FAQ
    • In study
      • Range of courses
        • Bachelor
        • Master
        • Double degrees
        • Languages
        • Extracurricular studies
        • Courses taught in English
        • Registration
      • Study organization
        • Deadlines and dates
        • Course schedule
        • Student ID
        • IT Services
        • Forms and regulations
        • Contributions and fees
        • Maternity protection
      • Further offers
        • Courses
        • practicING by BASIC
        • UNIKAT
        • Ilmkubator Start-up Service
        • Allianz THÜRING Science Camps
      • [Translate to English:] Student advice and support
        • Administrative Guide
        • Student administration in ASC
        • Studies advisory service
        • Advisory Compass
        • Family and health
      • In study
        • Courses
        • Lernplattform Moodle
        • Open Timetable
        • Webmail
        • Examination portal
        • Opinion Box
        • Jobs and career
        • Cloud
        • Mensa
        • Library
        • Semester contribution
        • Corona-Information
    • After graduation
      • Career Start
        • Career Center
        • Scientific career
        • Vacancies at the TU Ilmenau
        • Mentoring
        • Events
      • Start-up service
        • Service
        • Ilmkubator Class
        • Partners and network
        • Start-up stories
        • Contact
      • Further training
        • further education offer
        • Service and advice
        • PATONakademie
        • TU Ilmenau Citizens Campus
      • Alumni
        • AlumniCampus
        • Find Alumni
        • Meet Alumni
        • Stay informed
        • Events
        • Alumni Faces
      • After graduation
        • register as alumni
        • Graduation ceremony
        • Promotion
        • Graduate Center
        • Career Center
        • Ilmkubator
        • Central Institute for Continuing Education
        • PATONakademie
        • TU Ilmenau Citizens Campus
        • Central Institute for Education
  • Research
    • Zwei Forscher im Reinraum mit Mundschutz Research activities
      • Research Profile
      • Research International
      • Research Projects
      • Faculties
      • Institutes and Technological Centers
      • Research Partners of the TU Ilmenau
    • Economy and Transfer
      • Transfer strategy and fields of action
      • Cooperation with TU Ilmenau
      • Transfer and region
      • Associated Institutes
      • Start-ups from the TU Ilmenau
    • Internationale Forscherinnen und Forscher am Rechner Scientific career
      • Doctorate
      • Habilitation and Junior-Professorship
      • Tenure Track
      • Graduate Center
    • Service
      • Division of Research Service and Technology Transfer
      • Ilmkubator Start-up Service
      • PATON
      • Continuing education and training - Central Institute for Education
      • Research-related services of the University Library
    • Quicklinks
      • Scientific Year 2023 "Sustainability"
      • Research Blog
      • Property rights
      • Events
      • Transparency guidelines
      • Good scientific practice
      • Good working conditions in science
  • International
    • Come In
      • Students
      • Scientists
      • Campus Life
    • Go Out
      • Students
      • Scientists
      • Employees
    • Flaggen wehen im Wind TU Ilmenau worldwide
      • Cooperations
      • Double degrees
      • Erasmus+
      • Research International
    • Frau und Mann am Infotresen im Gespräch Service
      • International Office
      • Welcome Center for International Researchers
      • we4you student service
      • we4you COVID-19 information
      • Intranet
    • International
      • EU-Praktikum THURINGIA
      • Welcome Center
      • Your start in Ilmenau
      • Academic Preparation Course
      • Refugees
      • DAAD
      • Lecture 'Studying International'
      • Mobility Online
      • GRIAT
Logo Technische Universität Ilmenau

Sub-project TP

  • Research Training Group NanoFab
  • Team
  • Research
    • Sub-project B
    • Sub-project TM
    • Sub-project TP
    • Projects of 2nd Generation
  • Study program
    • RTG Lectures
    • Lectures
    • Soft Skills
  • Publications
  • News
×
 
Deutsch

Contact

Prof. Dr.-Ing. Steffen Strehle
Head of Group

Microsystems Technology Group
Am Helmholtzring 12 (Werner-Bischoff-Bau room 3110)
98693 Ilmenau

Phone: +49 3677 69-2485
Fax: +49 3677 69-1801

Contact form

  • Homepage
  • University
  • Departments
  • Department of Mechanical Engineering
  • Profile
  • Institutes and Groups
  • Research Training Group NanoFab
  • Research
  • Sub-project TP

The fabrication of fluorescent 3D micro-/nanostructures offers innovative potential with respect to the application as well as the characterisation of optical micro-/nanostructures. The goal of this project is to investigate the coupling of microstructured, fluorescent coated optical resonators and their experimental characterization with single photon imaging. Microstructured whispering gallery mode resonators will offer exciting new application potential. 3D micro-and nanostructuring investigated in NanoFab are the key technologies to control the resonator morphology and thus address the coupling challenges in a unique manner.

Key categories:

  • optics
  • microtechnology and nanofabrication / lithography
  • optical metrology
 

Nanoimprint lithography (NIL) has a great potential for economic mass production of nanostructures and makes other fabrication technologies economically viable by means of "mix-and-match" lithography. However, there is a need for positioning and angular control of the NIL stamp and the measurement of the contact pressure to ensure uniform imprint results. In this project, new approaches to record and control position, angle and forces over the entire imprint process, e.g. by fibre-coupled interferometers are to be investigated. Additionally, changes in the stamp morphology shall be as well recorded and corrected within the printing process and yield finally an increased reproducibility of NIL nanofabrication that should be demonstrated for selected exemplary applications.

Key categories:

  • nanoimprint lithography
  • fibre optic interferometry
  • micro- and nanofabrication
  • mechanical and optical simulations
 

back to research

Contact

TU Ilmenau
Ehrenbergstraße 29
98693 Ilmenau
Phone +49 3677 69-0

opens the direction in new tab (map)© OpenStreetMap contributors, CC BY-SA

Service

  • Intranet
  • Structure and contact persons
  • Jobs and career
  • Campus and directions

Infos

  • Prospective students
  • Students
  • Companies
  • Journalists
  • TU Ilmenau 2023
  • Data protection
  • Imprint
  • Accessibility