Microsystems Technology Group Am Helmholtzring 12 (Werner-Bischoff-Bau room 3110) 98693 Ilmenau
Phone: +49 3677 69-2485 Fax: +49 3677 69-1801
The fabrication of fluorescent 3D micro-/nanostructures offers innovative potential with respect to the application as well as the characterisation of optical micro-/nanostructures. The goal of this project is to investigate the coupling of microstructured, fluorescent coated optical resonators and their experimental characterization with single photon imaging. Microstructured whispering gallery mode resonators will offer exciting new application potential. 3D micro-and nanostructuring investigated in NanoFab are the key technologies to control the resonator morphology and thus address the coupling challenges in a unique manner.
microtechnology and nanofabrication / lithography
Nanoimprint lithography (NIL) has a great potential for economic mass production of nanostructures and makes other fabrication technologies economically viable by means of "mix-and-match" lithography. However, there is a need for positioning and angular control of the NIL stamp and the measurement of the contact pressure to ensure uniform imprint results. In this project, new approaches to record and control position, angle and forces over the entire imprint process, e.g. by fibre-coupled interferometers are to be investigated. Additionally, changes in the stamp morphology shall be as well recorded and corrected within the printing process and yield finally an increased reproducibility of NIL nanofabrication that should be demonstrated for selected exemplary applications.