High throughput AFM inspection system with parallel active cantilevers. - In: Photomask Technology 2019, (2019), S. 111481E-1-111481E-10
Atomic Force Microscopes are capable to provide non-destructive high resolution, CD-metrology and precise defect analysis. However, a conventional AFM has not enough throughput for today's large scale semiconductor manufacturing. The primary point remains the increase of the scanning area in case of large wafers, masks, displays or dies. Cantilever array-based AFMs are intended to increase the imaging throughput by parallelizing the work of many AFM probes that may be practiced by parallel AFM systems that are capable to operate autonomously. An active cantilever scheme makes it possible to sense electronically the deflection and individually to control the actuation of every cantilever in the array. Each cantilever in the array represents a self-sustaining AFM-hardware system for metrology and imaging. In that, the multiple parallel probes are forming many AFMs capable to work independently.
https://doi.org/10.1117/12.2537009
Defect detection from compressed 3-D ultrasonic frequency measurements. - In: 27th EUSIPCO 2019 - European Signal Processing Conference, (2019), insges. 5 S.
https://doi.org/10.23919/EUSIPCO.2019.8903133
Joint high-resolution delay-doppler estimation for bi-static radar measurements. - In: 2019 16th European Radar Conference, (2019), S. 145-148
https://ieeexplore.ieee.org/document/8904605
OFDM waveform for distributed radar sensing in automotive scenarios. - In: 2019 16th European Radar Conference, (2019), S. 225-228
https://ieeexplore.ieee.org/document/8904754
Simulation of lightning current distributions in a realistic human head model. - In: 2019 27th International Conference on Software, Telecommunications and Computer Networks (SoftCOM), (2019), insges. 6 S.
https://doi.org/10.23919/SOFTCOM.2019.8903746
Channel correlation diversity in MU-MIMO systems - analysis and measurements. - In: 2019 IEEE 30th Annual International Symposium on Personal, Indoor and Mobile Radio Communications (PIMRC), (2019), insges. 7 S.
https://doi.org/10.1109/PIMRC.2019.8904875
Enhanced localization systems with multipath fingerprints and machine learning. - In: 2019 IEEE 30th Annual International Symposium on Personal, Indoor and Mobile Radio Communications (PIMRC), (2019), insges. 6 S.
https://doi.org/10.1109/PIMRC.2019.8904120
Robust automotive satellite navigation achieved with distributed groups of sub-arrays. - In: AMTA 2019 proceedings, (2019), insges. 5 S.
https://doi.org/10.23919/AMTAP.2019.8906347
Monostatic RCS measurements of a passenger car mock-up at 77 GHz frequency in virtual environment. - In: 2019 49th European Microwave Conference, (2019), S. 996-999
https://doi.org/10.23919/EuMC.2019.8910719
Co-polarized bi-static RCS measurements of vulnerable road users between 1 and 10 GHz. - In: 2019 49th European Microwave Conference, (2019), S. 992-995
https://doi.org/10.23919/EuMC.2019.8910693