EuroNanoLab Dry Etching Expert Meeting
Contact
Dr. Dörte Gerhardt
Head of Research Service and Technology Transfer
03677 69-2512
doerte.gerhardt@tu-ilmenau.de
Dr. Dörte Gerhardt
Head of Research Service and Technology Transfer
03677 69-2512
doerte.gerhardt@tu-ilmenau.de
On November 11 and 12, 2025, leading dry etch experts from Europe's top nano labs met at Ilmenau University of Technology to discuss current developments and future trends in dry etch technologies. The Center of Micro and Nanotechnologies brought together experts who spent two days sharing the latest findings, discussing practical applications and providing valuable insights into the latest processing, cleaning and conditioning methods. The atmosphere was characterized by professional depth, lively exchange and genuine enthusiasm for technological advances.
In addition to the presentations by Christoph Weigel from the Ilmenau University of Technology and Jörg Schuster and Georg Umlauf from the Fraunhofer ENASalso the participation of our partner companies SENTECH Instruments GmbH and memsstar LimitedSENTECH provided practical training in interactive sessions covering topics such as process optimization for various materials, endpoint detection with ellipsometry and OES as well as the functionality of innovative plasma sources. There was also a separate session on open questions, after-sales service and future collaborations. Memsstar complemented the program with an exciting presentation on vacuum-controlled metal assisted chemical etching from the gas phase, a process that was of particular interest for silicon structures with a high aspect ratio. The meeting offered a varied program with a strong content. Participants were given an insight into Ilmenau's cleanroom infrastructureand learned about current research work. Lectures on sustainable RIE approaches and the reactive ion etching of silicate glasses encouraged discussions, as did the presentation of halogen-free plasma etching processes, supplemented by modeling and life cycle analyses. Other focal points were ultra-modern dry-etch solutions for diamond, SiC, ALE and the processing of a wide range of semiconductor materials, accompanied by exciting approaches to in-situ process monitoring using ellipsometry, reflection measurement and OES. The presentation of optimal plasma sources for precise low-damage processes also attracted a great deal of attention. The event was rounded off with guided tours of the clean rooms and laboratories at TU Ilmenau, which gave participants a direct insight into the local research conditions. The EuroNanoLab expert meeting was an all-round success and provided many helpful insights for further work in the field of dry etching.
Organizers:
Maria Illing (+49 3677 69 3400), Center for Micro- and Nanotechnologies, TU Ilmenau
Djaffar Belharet, Department MN2S, CNRS, FEMTO-ST
Andrei Avram, National Institute for R&D in Microtechnologies - IMT Bucharest
EuroNanoLab is a distributed research infrastructure consisting of over 40 state-of-the-art academic nanofabrication centers across Europe. Its main vision is to accelerate micro- and nanotechnology research by enabling the transformation of a fragmented landscape of nanofabrication facilities into an integrated knowledge base that supports scientific excellence and provides researchers with a fast track to results.
More information: www.euronanolab.eu
Maria Illing/ TU Ilmenau
Maria Illing/ TU Ilmenau
Maria Illing/ TU Ilmenau
Maria Illing/ TU Ilmenau
Maria Illing/ TU Ilmenau
Maria Illing/ TU IlmenauZentrum für Mikro- und Nanotechnologien (ZMN)
Technische Universität Ilmenau
Feynmanbau, Room 114/115
Gustav-Kirchhoff-Straße 7
98693 Ilmenau, Germany
The nearest major international airports are:
From the airport, you can take a train to Erfurt Central Station, then transfer to a regional train (Erfurter Bahn) to Ilmenau Station.
Train connections are available at www.bahn.com.
We recommend that you check your itinerary beforehand and book train tickets early.
Please arrange your accommodation individually. We recommend the following hotels, which are within walking distance of the university:
The TU Ilmenau campus is reachable on foot from all hotels. The Feynmanbau is located near the rear university parking lots.
If you have mobility concerns or need assistance getting to the venue, please do not hesitate to contact us – we will gladly help you find a solution.
Public parking is available directly behind the university and within walking distance of the Feynmanbau.
