Parallel active cantilever AFM tool for high-throughput inspection and metrology. - In: Metrology, Inspection, and Process Control for Microlithography XXXIII, (2019), S. 1095929-1-1095929-6
Atomic Force Microscopy (AFM) is a capable to provide high resolution CD-metrology and precise defects analysis on large wafers, masks or displays. However, AFM is not enough productive for high-throughput industrial uses. Standard single probe AFMs are showing low throughput as a serial imaging tools. The use of an array of four cantilevers as a Quattro-Array results in effective speed of 6 to 10 mm/s. An image size of 0.5 mm x 0.2 mm is achieved employing a piezoelectric positioner with a scan range of 200 [my]m x 200 [my]m and a resolution of 0.25 nm (x,y) and 0.2 nm (z), respectively. These capabilities are qualifying the Quattro-cantilever array system as fastest tool for. In this paper we present new results obtained with our Quattro-AFM high-throughput parallel SPM system that exhibits two key advances that are required for a successful deployment of SPM in time-efficient metrology, defect analysis and mask inspection.
https://doi.org/10.1117/12.2515091
Three-dimensional deformation of tendon-bone insertions under load. - In: Journal of morphology, ISSN 1097-4687, Volume 280 (2019), issue S1, Seite S213
https://doi.org/10.1002/jmor.21003
On the development and qualification of multiaxial designs of nanofabrication machines with ultra precision tool rotations. - In: Proceedings of the 19th International Conference of the European Society for Precision Engineering and Nanotechnology, (2019), insges. 2 S.
The majority of nanopositioning and nanomeasuring machines (NPMMs) are based on three independent linear movements in a Cartesian coordinate system with a repeatability in the nanometer range. This in combination with the specific nature of sensors and tools limits the addressable part geometries. This article contributes to the enhancement of multiaxial machine structures by the implementation of rotational movements while keeping the precision untouched. A parameter based dynamic evaluation system with quantifiable technological parameters has been set up and employed to identify general solution concepts and adequate substructures. It further on contains data based on comprehensive design catalogues, uncertainty calculations and CAD-model based footprint analysis for specific setups. First evaluations show high potential for sample scanning mode variants considering linear movements of the object in combination with angular movements of the tool, considering a goniometer setup in specific. Based on this, positioning systems for the tool rotation of a NPMM were selected and the positioning properties of different arrangements were determined in test series using autocollimators. General properties of the influence of the arrangement were derived. The arrangement of the substructures which fulfils the previous given requirements is integrated into the NPMM and investigated for long-term stability using a retroreflector as a tool and various laser interferometers. The influence of the additional positioning systems on the existing structure of NPMMs are investigated and solutions for the optimization of the overall system with regard to reproducibility and long-term stability are developed. For this purpose, comprehensive FEA simulations are carried out and structural adjustments are derived via topology optimizations. After all, the knowledge gained is formed into general rules for the verification and optimization of design solutions for multiaxial nanopositioning machines.
Measuring setup for the investigation of the reproducibility of tool changing interfaces for high-precision devices. - In: Proceedings of the 19th International Conference of the European Society for Precision Engineering and Nanotechnology, (2019), S. 172-173
High-precision devices such as the nanopositioning and nanomeasuring machines developed at Technische Universität Ilmenau are capable of measuring structures with nanometre precision. The machines are prepared for the use of different measuring tools, whereby the tool change has to be done manually. The reproducibility of the tool change is not sufficient to continue measuring without elaborate calibration. The extension of the machine capabilities for use in nanofabrication requires an automatic, highly reproducible tool change. A reproducibility of the changing interface of 30 nm is targeted. State of the art interfaces have a reproducibility which is one order of magnitude lower. To be able to measure the reproducibility in five DOF, an appropriate measuring method and setup are required. The required properties such as the measurement uncertainties are determined on the basis of these requirements. Measuring methods are compared, evaluated and selected systematically. The design of the measuring setup focuses particularly on minimizing disturbing temperature influences for the identification of function-determining influences of kinematic couplings. A vector-based uncertainty analysis is carried out to validate the setup.
Investigations of different compliant manipulator concepts for a high-precise rotational motion. - In: Proceedings of the 19th International Conference of the European Society for Precision Engineering and Nanotechnology, (2019), S. 64-67
Due to their advantages over conventional mechanisms, compliant mechanisms with notch flexure hinges are state of the art in precision engineering and micro systems technology. These compliant mechanisms are often used in positioning and adjustment applications with up to six degrees of freedom. In addition to the translational motions, as they are mainly required in linear tables and planar stages, also rotational motions are needed. For the realization of a high-precise rotation by compliant manipulators certain concepts with different complexity are existing. One approach is the use of flexure hinges with different geometrical parameters and notch shapes, which can be purposefully optimised depending on the requirements of the specific application. Another approach is the use of compliant mechanisms, in which the instantaneous centre of rotation represents the axis of rotation of the guided link either according to the remote centre of compliance concept or within the mechanism design space itself. In addition, a novel concept using a specific configuration of a four-bar mechanism, in which two adjacent links are of an equal length is presented in this contribution. The different approaches are compared by means of kinematic investigations and FEM-based simulations and the potential regarding a high-precise rotation with path deviations in the low micrometre range is shown.
Mechanical properties of an adjustable weighing cell. - In: Proceedings of the 19th International Conference of the European Society for Precision Engineering and Nanotechnology, (2019), S. 86-89
On the use of machine learning algorithms for the calibration of astigmatism PTV. - In: 13th International Symposium on Particle Image Velocimetry, (2019), S. 772-781
https://athene-forschung.unibw.de/129121
Experimental characterization of a fast heating system for microfluidic direct methanol fuel cells. - In: 13th International Symposium on Particle Image Velocimetry, (2019), S. 498-505
https://athene-forschung.unibw.de/128914
Convective near-wall flow in thermally stratified hot water storage tanks. - In: 13th International Symposium on Particle Image Velocimetry, (2019), S. 485-491
https://athene-forschung.unibw.de/128857
Simultaneous measurements of velocity and temperature fields in large aspect ratio Rayleigh-Bénard convection. - In: 13th International Symposium on Particle Image Velocimetry, (2019), S. 457-467
https://athene-forschung.unibw.de/128915